发明名称 Micromechanical pressure sensor
摘要 A micromechanical pressure sensor which is made up of at least one first component element and a second component element bordering on the first component element. In this context, the first component element includes at least one diaphragm and one cavity. The cavity is arranged or structured so that the medium to be measured gains access to the diaphragm through the cavity. In addition, in the second component element an opening is provided which guides the medium to be measured to the cavity. At least a part of the cavity represents an extension, without a transition, of the opening in the second component.
申请公布号 US7055392(B2) 申请公布日期 2006.06.06
申请号 US20040881382 申请日期 2004.06.30
申请人 ROBERT BOSCH GMBH 发明人 MUCHOW JOERG;BENZEL HUBERT;GUENSCHEL ROLAND
分类号 G01L7/08;G01L9/00;F16F5/00;H01L29/84 主分类号 G01L7/08
代理机构 代理人
主权项
地址