MEMS device having formations for covering actuators of the device

摘要

A micro-electromechanical device that comprises a substrate; an elongate actuator that has a fixed end that is connected to the substrate and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of an actuation signal; a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber.