发明名称 Finishing machine using laser beam
摘要 A machining device comprises workpiece holding means for holding a workpiece, laser beam machining means for shining a laser beam to the workpiece held by the workpiece holding means to machine the workpiece, and moving means for moving the workpiece held by the workpiece holding means, and a laser beam shone to the workpiece relative to each other. Suction means is disposed for sucking from a machining region where the laser beam is shone to the workpiece. The suction means includes a central hood, a central suction source for sucking through the central hood, an outer hood, and an outer suction source for sucking through the outer hood, and the suction force of the central suction source is greater than the suction force of the outer suction source.
申请公布号 US7057136(B2) 申请公布日期 2006.06.06
申请号 US20040483122 申请日期 2004.01.08
申请人 DISCO CORPORATION 发明人 SEKIYA KAZUMA
分类号 B23K26/00;B08B15/04;B23K26/08;B23K26/14;B23K26/38;B23Q11/00;H01L21/301 主分类号 B23K26/00
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