发明名称 Common optical-path testing of high-numerical-aperture wavefronts
摘要 A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.
申请公布号 US7057737(B2) 申请公布日期 2006.06.06
申请号 US20030652903 申请日期 2003.08.29
申请人 4D TECHNOLOGY CORPORATION 发明人 MILLERD JAMES E.;BROCK NEAL J.;HAYES JOHN B.;WYANT JAMES C.
分类号 G01B9/02;G01J9/02 主分类号 G01B9/02
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