发明名称 |
Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device |
摘要 |
A stage system that reduces disturbances caused by deformation of a cable and achieves high-precision positioning. The stage system includes a substrate stage movable in at least two axial directions, a fine-motion cable unit that holds a cable and finely moves in at least two axial directions, and a coarse-motion cable unit that coarsely moves the fine-motion cable unit in at least one axial direction.
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申请公布号 |
US7057710(B2) |
申请公布日期 |
2006.06.06 |
申请号 |
US20040893932 |
申请日期 |
2004.07.20 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KORENAGA NOBUSHIGE |
分类号 |
B23Q1/00;G03B27/58;G03B27/62;G03F7/20;H01L21/027 |
主分类号 |
B23Q1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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