HEATING APPARATUS FOR CHEMICAL OF SEMICONDUCTOR INSTRUMENT,申请号KR20050056022-传众专利搜索

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发明名称	HEATING APPARATUS FOR CHEMICAL OF SEMICONDUCTOR INSTRUMENT
摘要
申请公布号	KR100588400(B1)	申请公布日期	2006.06.02
申请号	KR20050056022	申请日期	2005.06.28
申请人	AST CO., LTD.	发明人	CHOI, JAE SEOK
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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