| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coater advantageous in space which can continuously coat a glass substrate with a coating liquid. <P>SOLUTION: A pair of parallel rails 2, 2 are installed on a base plate 1, a substrate placing stage 3 is arranged in the center between the rails 2, 2, a first and a second gate-type transfer mechanisms 4, 5 are laid symmetrically about a center line L crossing the rails at a right angle in a width direction of the substrate placing stage as a reference in a plan view and independently across the rails in a freely moving way, and slit nozzles 6, 7 are held to the gate-type transfer mechanisms 4, 5 in a liftable way. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
