发明名称 |
HIGHLY-ORIENTED DIAMOND FILM, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC DEVICE HAVING HIGHLY-ORIENTED DIAMOND FILM |
摘要 |
A highly-oriented diamond film which has a flat surface but does not have non-oriented crystals in the surface can be provided by depositing a first diamond layer on a substrate by {111} sector growth of diamond crystals by a CVD method using a gaseous mixture of methane and hydrogen as material gas, and then depositing a second diamond layer on the first diamond layer by {100} sector growth of diamond crystals by a plasma CVD method using a gaseous mixture of methane, hydrogen, and oxygen as material gas under the conditions that the pressure of the material gas is 133 hPa or more; the material gas composition is determined such that ([C] - [O])/[CH 3 + H 2 + O 2 ] is -0.2 × 10 -2 or more and [O]/[C] is 1.2 or less; and the substrate temperature is between 750°C and 1000°C. |
申请公布号 |
KR20060059820(A) |
申请公布日期 |
2006.06.02 |
申请号 |
KR20050113997 |
申请日期 |
2005.11.28 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO |
发明人 |
YOKOTA YOSHIHIRO;HAYASHI KAZUSHI;TACHIBANA TAKESHI;KOBASHI KOJI |
分类号 |
C30B29/04 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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