| 摘要 |
PROBLEM TO BE SOLVED: To finely adjust a focusing position in a proper relative positional relation between a specimen and an objective lens by quickly moving the specimen and objective lens close to or apart from each other without paying attention to a positional relation between the specimen and the objective lens. SOLUTION: The microscope system 1 comprises: a first focus mechanism 8 for moving the objective lens 5 close to or apart from a specimen A along an optical axis direction; a second focus mechanism 25 for displacing an internal optical system 22 along the optical axis direction; and a switching device 34 for switching between an operation by the first focus mechanism 8 and an operation by the second focus mechanism 25 when the objective lens 5 is placed in a predetermined switching position. COPYRIGHT: (C)2006,JPO&NCIPI
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