| 摘要 |
PROBLEM TO BE SOLVED: To provide an electroformed product in which the amount of deformation caused by plating is extremely reduced, and which is suitable as a stamper for an optical information recording medium. SOLUTION: The electroformed product is formed of the film of plating metal such as nickel (Ni) metal, has a fine pattern transferred from the surface of the object to be plated and is suitable as a stamper for an optical information recording medium. In the electroformed product, electrodeposition stress generated by electroforming is the compressive stress of 0 to 80 MPa, and the amount of the fine pattern on the surface to be deformed is about±2μm. Regarding the electroformed product, as shown in aμ-TAS (Micro-Total Analysis System) device or the like, an electroformed product composed of metal having a fine pattern can be used as a patterning member as it is, or a part obtained by dividing the electroformed product is used as a patterning member constructing a specified system. COPYRIGHT: (C)2006,JPO&NCIPI
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