| 摘要 |
PROBLEM TO BE SOLVED: To reduce material costs of a vacuum vessel 1 as a whole. SOLUTION: A vessel body 3, inside of which is connectable to a vacuum pump 5, and one side of which is formed with an opening 7 is provided. The vessel body 3 is detachably provided with a lid member 9 for opening and closing the opening 7. The lid member 9 is provided with a support member 17 receiving the external pressure by the atmospheric pressure from inside of the vessel body 3, when the inside of the vessel body 3 is made into a vacuum state by the exhaust operation of the vacuum pump 5. COPYRIGHT: (C)2006,JPO&NCIPI
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