Plasma reactor and and electrode plate used tin the same

摘要

A plasma reactor includes more than two electrode plates 1 , each electrode plate 1 including a dielectric members and an electrode 16 protected from a discharge space 50 by the dielectric member and having an electric-connecting coupling hole on one side and a non-electric-connecting coupling hole on the other side, the electric-connecting coupling hole having a shoulder 7 on which the electrode 16 is exposed, the electrode plates 1 being stacked such that a gap is interposed between the adjacent electrode plates 1 and the electric-connecting coupling hole and the non-electric-connecting coupling hole are alternately arranged; spacers 32, 34 installed between the adjacent electrode plates; and an electric-conductive coupler 40 which is inserted through an array of the electric-connecting coupling hole and the non-electric-connecting coupling hole to couple the electrode plates 1 together, and is caught into contact with the shoulder 7 to be electric-connected with the electrode 16 ; wherein electricity is applied through the electric-conductive coupler 40 to the electrode 16 to generate a plasma discharge.