| 摘要 |
<p>Disclosed is a heater unit comprising an electrode for raising the temperature of a heater by passing a current therethrough, a heater which is connected with the electrode and made of a material containing silicon carbide, a wafer holder for holding an object to be heated, and a chamber surrounding the heater and the wafer holder. At least the inner surface of the chamber is provided with a reflective layer.</p> |
