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发明名称
METHOD FOR FORMING A GATE OXIDE LAYER IN NON-VOLATILE MEMORY DEVICE AND METHOD FOR FORMING A GATE PATTERN INCLUDING THE SAME
摘要
申请公布号
KR20060058813(A)
申请公布日期
2006.06.01
申请号
KR20040097771
申请日期
2004.11.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG HWAN;LEAM, HUN HYEOUNG;LEE, JAI DONG
分类号
H01L21/8247
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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