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发明名称
FARADAY ASSEMBLY FOR ION IMPLANTATION APPARATUS
摘要
申请公布号
KR20060058800(A)
申请公布日期
2006.06.01
申请号
KR20040097701
申请日期
2004.11.25
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HWANG, SUN HO;PARK, SANG KUK
分类号
H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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