| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of moderating a change in distortion of a piezoelectric layer with respect to voltage supplied to the piezoelectric layer and hereby improving the accuracy of displacement control by the voltage, even when a piezoelectric material having a hysteresis of an electric field-distortion characteristic is used for the piezoelectric actuator. <P>SOLUTION: The piezoelectric actuator causes the distortion by stacking a plurality of the piezoelectric layers sandwiched with a conductive material, and applying driving voltage to each piezoelectric layer. In the piezoelectric actuator, a voltage level which achieves to a saturated electric field in a first piezoelectric layer among the plurality of the piezoelectric layers is different from the level of a second piezoelectric layer. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
