摘要 |
PROBLEM TO BE SOLVED: To provide a waveguide type optical wavelength multiplexer/demultiplexer that is entirely free from wavelength dependency because an optical wavelength multiplexer/demultiplexer is realized in a distortion-free quartz based optical waveguide circuit and that has stable reliability because warpage of the quartz-based optical waveguide on a silicon substrate is eliminated making residual stress dissipated. SOLUTION: In the quartz-based optical waveguide circuit, an input guided ray 100 is connected to the input channel waveguide 101 inside the circuit. In an input channel waveguide 103, on two proper isophase fronts of the guided ray, reflection mirrors 102, 104 are placed which are composed of a dielectric layer coincidental to the curvature of a light wave at each position, thereby constituting an optical resonator, with a light wave from this Fabry-Perot resonator emitted to a slab waveguide. The light wave, receiving wavelength selection by the Fabry-Perot resonator, converges into a focus for each wavelength, by the angle of incidence of the slab waveguide for each wavelength, on a plurality of desired output channel waveguides 106 which are connected to the slab waveguide 105 comprising a Rowland mount, and the light wave is then emitted to the outputting side. COPYRIGHT: (C)2006,JPO&NCIPI |