| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control method capable of more accurately adjusting the PID constant of an object to be controlled divided at least three temperature control zones, that is, a first zone, a second zone and an intermediate zone wherein at least two surfaces are held between the first and second zones. SOLUTION: In the temperature control method for subjecting the objects 13, 41 and 51 to be controlled, which are divided at least into three temperature control zones, that is, the first zones Z3, ZA and Zb, the second zones Z5, ZB, Zh and the intermediate zones Z4, ZC and Ze wherein at least two surfaces are held between the first zones Z3, ZA and Zb and the second zones Z5, ZB and Zh, to feedback control by PID control, the PID constants only of the intermediate zones Z4, ZC and Ze are adjusted first. COPYRIGHT: (C)2006,JPO&NCIPI
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