发明名称 |
Photo mask structure used during twice-performed photo process and methods of using the same |
摘要 |
A photo mask structure used during a twice-performed photo process and methods of using the same. The photo mask structure may include first mask patterns that correspond to first photoresist patterns during a first photo process performed on a first photoresist layer and second mask patterns that correspond to second photoresist patterns during a second photo process performed on a second photoresist layer. A method of using a photo mask structure may include performing a first photo process on a first photoresist layer using first mask patterns of the photo mask structure to form first photoresist patterns on a semiconductor substrate, and performing a second photo process on a second photoresist layer using second mask patterns of the photo mask structure to form second photoresist patterns on a semiconductor substrate, wherein the second photoresist patterns are interposed between the first photoresist patterns and overlap the first photoresist patterns.
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申请公布号 |
US2006115747(A1) |
申请公布日期 |
2006.06.01 |
申请号 |
US20050281466 |
申请日期 |
2005.11.18 |
申请人 |
LEE HYUNG-RAE;YOON JIN-YOUNG;WOO SANG-GYUN;RYOO MAN-HYOUNG;OH MIN-JEONG |
发明人 |
LEE HYUNG-RAE;YOON JIN-YOUNG;WOO SANG-GYUN;RYOO MAN-HYOUNG;OH MIN-JEONG |
分类号 |
G03C5/00;G03F1/00 |
主分类号 |
G03C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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