| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermoelectric conversion element for obtaining a large output by taking a temperature difference substantially in parallel to a film surface using a thin-film low-dimensional thermoelectric material. <P>SOLUTION: The thermoelectric conversion element includes a plurality of columnar structures 10. The columnar structure 10 is formed substantially perpendicularly to a film surface, and is a thermoelectric conversion material surrounded by an insulating material 11. A temperature distribution over the thermoelectric conversion material is substantially parallel to the film surface. Further, the thickness of the insulating material 11 surrounding the adjacent columnar structures 10 is preferably≤3 nm, and the insulating material 10 is formed into a thin-film shape. Moreover, the insulating material 11 is an amorphous material, and preferably silicon containing aluminum, germanium containing aluminum, or a silicon oxide containing aluminum. The diameter of the columnar structure 10 is preferably≥0.5 nm and≤15 nm, and an average interval between the columnar structures is preferably≥5 nm and≤20 nm. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
