| 摘要 |
PROBLEM TO BE SOLVED: To measure a fine particle such as dust with high accuracy by realizing high flow rate accuracy in a fluid sucking means while extending the life of the suction means and reducing the cost thereof, and to execute a purge work necessary before an actual operation or before a calibration work in a short time. SOLUTION: A fan motor 13 is applied to the suction means sucking and discharging a fluid, the flow rate of the fluid carried by the suction and discharge of the fan motor 13 is measured by a flowmeter 11, and the rotating speed of the fan motor 13 is controlled, in accordance with the measured flow rate, by a flow control part 12 so that the flow rate is constant. According to this, since the rotating speed of the fan motor 13 is controlled so that the flow rate measured by the flowmeter 11 is constant, the flow rate of the fluid is made constant, and a measurement of any fine particle in a fine particle detection part 3 can be executed with high accuracy. COPYRIGHT: (C)2006,JPO&NCIPI
|
