SHEET-LIKE PROBE, ITS MANUFACTURING METHOD, AND ITS APPLICATION

摘要

PROBLEM TO BE SOLVED: To form prescribed through holes even in a thick insulating film and heightening fixing strength between contact films and a support in a sheet-like probe in which electrode structures to be connected to electrodes to be inspected of a circuit device are passed through and supported by the insulating film and a plurality of the contact films are supported by the support. SOLUTION: The sheet-like probe uses a frame plate 11 made of a mesh, a metal, or the like as the support and is provided with both the plurality of contact films 15 in which the plurality of electrode structures 17 to be connected to the electrodes to be inspected of the circuit device 1 are passed through and supported by the insulating film 16 made of a flexible resin and the frame plate 11 for supporting the contact films 15. For forming short-circuit parts 17c of the electrode structures, the through holes 23b to be previously formed in a resin sheet 16a for forming the flexible insulating film are formed from both sides by etching. COPYRIGHT: (C)2006,JPO&NCIPI