| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source and an ion generating method having a wide operating range. SOLUTION: An ion source and a method are provided in which molecular ion is generated in a cold operation mode and atomic ion is generated in a hot operating mode. In several implementation cases, a first and a second electron sources are arranged at both ends of an arc chamber. The first electron source is energized energy by a cold operation mode, and the second electron source is energize by a hot operation mode. In another implementation case, electrons are directed to pass through the holes of a cathode in the cold operation mode and are directed to go toward the cathode in the hot operation mode. Further, in the other implementation case, the ion beam generating device comprises a molecular ion source, an atomic ion source, and a switching element for selecting one of the two ion sources. COPYRIGHT: (C)2006,JPO&NCIPI
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