MICROWAVE HEATING METHOD AND MICROWAVE HEATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a microwave heating method and a microwave heating apparatus for rapidly and uniformly heating a ceramic carrier with low power consumption. SOLUTION: The method irradiating a microwave W to a microwave absorber 13 disposed in a cavity resonator to heat a ceramic carrier 14 with the absorber 13 carried thereon uses a microwave absorber containing a silicon carbide-based complex oxide as the absorber 13 and also uses a cuboid type cavity resonator 110 of a signal mode as the cavity resonator. COPYRIGHT: (C)2006,JPO&NCIPI