| 摘要 |
PROBLEM TO BE SOLVED: To provide abrasive cloth and paper suitably suppressed in a change of polishing efficiency and in clogging and heating at a polishing end time, and having high follow-up performance. SOLUTION: In this abrasive cloth and paper 10, a plurality of polishing projecting parts 14 form a three-dimensional structure having a substantially flat top face 20 having a fixed height which is more than twice as long as an average particle size of abrasive grain 32, a bottom face 22 larger than the top face 20 and a curved face 24 for connecting the top face 20 and the bottom face 22, and each of the polishing projecting parts 14 is independently fixed to the whole surface of a flexible substrate sheet 12. The polishing projecting parts 14 form a three-dimensional structure having a substantially flat top face 20 having a fixed height which is more than twice as long as the average particle size of the abrasive grain 32, the bottom face 22 larger than the top face 20, and the curved face 24 for connecting the top face 20 and the bottom face 22. The polishing projecting parts 14 are mutually and independently fixed and the bottom parts are not mutually bound. COPYRIGHT: (C)2006,JPO&NCIPI
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