发明名称 |
Micro-fluid ejection head containing reentrant fluid feed slots |
摘要 |
A method of micro-machining a semiconductor substrate to form through slots therein and substrates made by the method. The method includes providing a dry etching chamber having a platen for holding a semiconductor substrate. During an etching cycle of a dry etch process for the semiconductor substrate, a source power is decreased, a chamber pressure is decreased from a first pressure to a second pressure, and a platen power is increased from a first power to a second power. Through slots in the substrate provided by the method can have a reentrant profile for fluid flow therethrough.
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申请公布号 |
US2006113277(A1) |
申请公布日期 |
2006.06.01 |
申请号 |
US20040002453 |
申请日期 |
2004.12.01 |
申请人 |
LEXMARK INTERNATIONAL, INC. |
发明人 |
KRAWCZYK JOHN W.;MCNEES ANDREW L.;WARNER RICHARD L. |
分类号 |
C23F1/00;H01L21/302;H01L21/461 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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