发明名称 Differential pressure flowmeter, flow controller, and apparatus for processing substrate
摘要 A differential pressure flowmeter comprises a tube having a circular section, a first pressure sensor for measuring a pressure of a liquid flowing into the tube, a second pressure sensor for measuring a pressure of a liquid flowing out of the tube, a storage part for storing information and an operation part for performing various computations. In the differential pressure flowmeter, a laminar flow where a Reynolds number is less than or equal to 2000 is formed within the tube. Outputs from the first pressure sensor and the second pressure sensor are transmitted to the operation part, a pressure difference between both ends of the tube is obtained, and then a flowrate of a liquid flowing through the tube is determined on the basis of the pressure difference and flowrate information stored in the storage part in advance. In the differential pressure flowmeter, after the flow is made laminar completely, the pressure difference is obtained and it is thereby possible to perform measurement of the flowrate stably with high accuracy.
申请公布号 US2006112771(A1) 申请公布日期 2006.06.01
申请号 US20050252322 申请日期 2005.10.14
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 MIZOHATA YASUHIRO
分类号 G01F1/37 主分类号 G01F1/37
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