发明名称 |
MULTIPLE SHADOW MASK STRUCTURE FOR DEPOSITION SHADOW MASK PROTECTION AND METHOD OF MAKING AND USING SAME |
摘要 |
<p>The present invention is a multi-layer shadow mask and method of use thereof. The multi-layer shadow mask includes a sacrificial mask bonded to a deposition mask. The sacrificial mask provides protection against an accumulation of evaporant on the deposition mask which would cause the deposition mask to deform.</p> |
申请公布号 |
WO2006058081(A2) |
申请公布日期 |
2006.06.01 |
申请号 |
WO2005US42468 |
申请日期 |
2005.11.22 |
申请人 |
ADVANTECH GLOBAL, LTD.;CONRAD, JEFFREY, W. |
发明人 |
CONRAD, JEFFREY, W. |
分类号 |
H01L21/3205 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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