| 摘要 |
A core insert ( 1 ) for glass molding machine includes a substrate ( 10 ) and a plurality of complex films ( 12 ) deposited on a surface of the substrate ( 10 ). Each complex film ( 12 ) is composed of a noble metal layer ( 120 ), an insulating metal oxide layer ( 122 ), and a hard film ( 124 ). The insulating metal oxide layer is formed on a surface of the noble metal layer, and the hard film is formed on a surface of the insulating metal oxide layer. A vacuum sputtering apparatus 2 for making a core insert includes a vacuum chamber 4 , a plurality of target frameworks for holding a plurality of targets, and a substrate framework for holding substrates. The target frameworks and the substrate framework are installed in the vacuum chamber, and the substrate framework has a rotation mechanism and a revolution mechanism associated therewith.
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