| 摘要 |
<p>A problem in a conventional technique that inspection performance deteriorates as the size of a transparent plate body increases is eliminated. A method for inspecting a defect of a transparent plate body comprises a step of imaging the major surface of a transparent plate body (1) (hereinafter referred to as a first image) using a first reflective bright-field optical system having a linear light source (2) and a camera (3) that are arranged on the major surface side of the transparent plate body (1), a step of similarly imaging the rear surface of the transparent plate body (1) (hereinafter referred to as a second image), a step of searching for a defeat candidate in each of the first and the second image, and a step of determining whether a defect candidate is present at a position where the first and the second image correspond to each other, in which, when both the first and the second image have a defect candidate, the defect candidates are considered a defect, and when only either the first or the second image has a defect candidate, the defect candidate is considered a pseudo-defect.</p> |
