发明名称 TRANSFER ARM
摘要 A conveying arm 100 of the invention includes a first pivotable shaft 104; a first arm 102 having a one-side end portion connected to the first pivotable shaft; a third arm 110 having an intermediate pivotable portion 118a and a one-side end portion pivotably connected to an other-side end portion of the first arm; and a fifth arm 120 having a one-side end portion pivotably connected to an other-side end portion of the third arm. The conveying arm 100 also includes a second pivotable shaft 108; a second arm 106 having a one-side end portion connected to the second pivotable shaft; a fourth arm 114 having an intermediate pivotable portion 118b pivotably connected to the intermediate pivotable portion of the third arm and a one-side end portion pivotably connected to an other-side end portion of the second arm; and a sixth arm 124 having a one-side end portion pivotably connected to an other-side end portion of the fourth arm. A seventh arm 132 has a holding portion 132a for an object to be conveyed, and are pivotably connected to an other-end portion of the fifth arm and an other-end portion of the sixth arm. With respect to both the third arm and the fourth arm, a line linking the one-side end portion to the intermediate pivotable portion is substantially perpendicular to a lime linking the other-side end portion to the intermediate pivotable portion. <IMAGE>
申请公布号 DE69931057(D1) 申请公布日期 2006.06.01
申请号 DE1999631057 申请日期 1999.07.22
申请人 TOKYO ELECTRON LTD 发明人 SAEKI, HIROAKI
分类号 B25J9/10;H01L21/00;H01L21/677;H01L21/687 主分类号 B25J9/10
代理机构 代理人
主权项
地址