| 摘要 |
<p>A plurality of subsidiary transport paths are disposed crossing a main transport path, for transferring a workpiece. A stocker is disposed at each cross point between the main transport path and each of the subsidiary transport paths. The stocker transfers the workpiece to and from the main transport path and a corresponding subsidiary transport path and temporarily stocks the workpiece. A plurality of processing apparatuses are disposed corresponding to each of the subsidiary transport paths. The processing apparatus receives the workpiece transported on a corresponding subsidiary transport path, processes it, and returns it to the corresponding subsidiary transport path. An efficient transport as a whole can be realized.</p> |
