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发明名称
DISPENSING METHOD FOR THE BATTOM ANTI REFLECTIVE COATING IN SEMI CONDUCTOR WAFER
摘要
申请公布号
KR100587909(B1)
申请公布日期
2006.06.01
申请号
KR20040114246
申请日期
2004.12.28
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KANG, MYOUNG KIL
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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