| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device which can inspect a substrate by switching inspection conditions even when an eye relief is short. SOLUTION: In the substrate inspection device which inspects by switching optical adapters 20 and 30 arranged between a light source 10 and a wafer 5, an optical adapter 30 which is made to move the optical adapters 20 and 30 horizontally, and is acted for inspection by horizontal position change driver 40 is moved to up to an optical axis. Then, the optical adapter 30 is moved in the direction of the optical axis by a perpendicular driver 50. At this time, the drop of the optical adapter 20 which is not acted now is limited by a stopper 60. As a result, the interference between the optical adapter 20 and a probe card 70 is prevented. COPYRIGHT: (C)2006,JPO&NCIPI
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