| 摘要 |
PROBLEM TO BE SOLVED: To cause no turbulence in ultrasonic traveling wave due to fluid flow in a cleaning tank, and to efficiently discharge particles separated from a cleaning object by ultrasonic cleaning. SOLUTION: An ultrasonic transducer 2 is disposed on a side face of the cleaning tank 1 filled with cleaning liquid. A cleaning liquid inlet port 3 is provided on the side face of the cleaning tank 1 with the ultrasonic transducer 2 disposed thereon. A cleaning liquid outlet port 4 is disposed on the side face of the cleaning tank 1 opposite to the inlet port 3 via the cleaning object 5 held in the cleaning tank 1. The directions of liquid flow caused by flow-in and flow-out of the cleaning liquid are set the same as the directions of the ultrasonic traveling wave and the cleaning object 5 is cleaned. COPYRIGHT: (C)2006,JPO&NCIPI
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