TEMPERATURE CONTROL METHOD OF SMALL FLOW RATE LIQUID AND ITS SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a temperature control method of small flow rate liquid for supplying liquid which is subjected to highly precise temperature control as fine flow or intermittent flow, and to provide its system.

SOLUTION: Liquid supplied from a supply path 3 is pressurized and introduced to a circulation path 5, and is subjected to temperature control by a temperature controller 7 in the circulation path 5 while being circulated in its pressurized state in the circulation path 5 by a pump 6. The liquid is supplied to an external device as fine continuous flow or fine intermittent flow of a flow rate smaller than at least half the flow rate in the circulation path 5 by adjustment of a discharge valve 10 provided to the discharge path 9 through the discharge path 9 branched from the circulation path 5.

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