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发明名称
Verfahren zur Herstellung von Sensoren sowie nicht-vereinzelter Waferstapel
摘要
申请公布号
DE19700734(B4)
申请公布日期
2006.06.01
申请号
DE1997100734
申请日期
1997.01.11
申请人
ROBERT BOSCH GMBH
发明人
KURLE, JUERGEN;WEIBLEN, KURT;PINTER, STEFAN;MUENZEL, HORST;BAUMANN, HELMUT;SCHUBERT, DIETRICH;BENDER, KARL;LUTZ, MARKUS
分类号
H01L23/04;H01L29/84;G01L9/00;H01L23/10
主分类号
H01L23/04
代理机构
代理人
主权项
地址
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