METHOD FOR PRODUCING SUBSTRATE WITH MICROLENS AND METHOD FOR PRODUCING COUNTER SUBSTRATE FOR LIQUID CRYSTAL DISPLAY PANEL

摘要

PROBLEM TO BE SOLVED: To form aspherical microlenses having high precision and high utilization efficiency of light by single etching.

SOLUTION: The method for producing a substrate with microlenses comprises: an etching rate control part forming stage where etching non-resistant films 32 composed of the material to be substantially etched with a prescribed etchant are formed on regions including the respective apexes in polygonal regions to be the opening parts of recessed parts 10; an etching resistant film forming stage where etching resistant films 34 are formed on the surface of a translucent substrate 12; a hole part forming stage where a hole part 36 is formed in the central position on the regions to be the opening parts of the recessed parts 10; and an etching stage where a prescribed etchant is introduced into the hole part 36, and the translucent substrate 12 is etched, so as to form the recessed parts 10.

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