TESTING SYSTEM FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND PROBE CARD

摘要

PROBLEM TO BE SOLVED: To achieve high-accuracy measurement, using an inspection device (tester) in a general semiconductor integrated circuit device in a test system for measuring the output voltage of the semiconductor integrated circuit device, having an analog signal output terminal, or the like that requires the assurance of changes in the output voltage value with high accuracy. SOLUTION: In the semiconductor integrated circuit device testing system, an input signal conversion circuit is installed at the prestage of an analog/digital conversion circuit on a probe card, thus achieving precise measurement, in agreement with the measurement purpose. As the input signal conversion circuit, a voltage level conversion circuit, an impedance matching circuit, an integral circuit, and the serial connection of these circuits are available. COPYRIGHT: (C)2006,JPO&NCIPI