MOBILE BODY SYSTEM, EXPOSURE APPARATUS, AND METHOD OF PRODUCING DEVICE

摘要

Stopper mechanisms (48A, 48B) prevent a wafer table (WTB) and a measurement table (MTB) from approaching each other closer than a predetermined distance, and a drive mechanism (34A) can cancel the prevention. As a consequence, for example, when stationary members (81, 80) are driven independently, the stopper mechanisms can prevent the tables from coming into contact with each other even if either of them is runaway. This enables, when the tables are set closer to each other than the predetermined distance, the prevention by the stopper mechanisms to be cancelled by a cancellation mechanism, enabling both tables to be closer without interference by the stopper mechanisms.