| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a jig set for polishing constituted of combinations of a plurality of jig units and method for polishing a plurality of bodies to be polished for smoothly and exactly performing polishing without damaging the bodies to be polished and without changing a plurality of arrangement patterns of the bodies to be polished in a series of processes. <P>SOLUTION: This jig set is constituted of the combinations of the plurality of jig units to be used in the series of processes till the plurality of bodies 10 to be polished are arranged in a polishing jig 200 and the bodies 10 to be polished are removed from the polishing jig 200 after finishing polishing of the bodies 10 to be polished. The jig unit is constituted of a small tray 1 for arrangement, a divided tray 2, a divided plate allowing the arrangement of bodies 10 to be polished mounted on the tray 1 in transfer states on the surface of the polishing jig 200, and a small tray for removal for enabling transferring of the bodies 10 to be polished removed from the surface of the polishing jig 200 by a prescribed exfoliation treatment in the transfer states and divided states into partial patterns. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
