| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a marking method for marking a protective film with sufficient accuracy by suppressing the curvature of a work in the process where marking is carried out to the protective film formed in the work, and to provide a sheet used suitably in the both methods for protective film formation and for dicing. <P>SOLUTION: The marking method is carried out by marking the protective film by using laser beam irradiation to this protective film from the support film side in the laminated state constituted of the support film stretched by the ring frame on which the protective film is laminated freely of exfoliation where the work is fixed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
