| 摘要 |
PROBLEM TO BE SOLVED: To enhance the image quality of an image photographed by scanning electron microscope. SOLUTION: In this scanning electron microscope equipped with an electron source 101 for irradiating a primary electron beam 108 on sample wafer 106, an accelerating electrode 102, a focusing lens 103, a deflector 104, an objective lens 105 or the like, a detector 110 to acquire a digital image by sampling an emitted electron signal 109 generated from the sample wafer 106, a digitalizing means 111 or the like, an image memory 116 for storing, displaying, and processing the acquired digital image, an input and output part 118, an image forming part 115, and an image processing part 114 or the like, a sampling means for sampling the discharged electron signal 109 at intervals that are finer than the pixel size of the memorized, displayed or processed digital image, and an image formation processing means for forming the digital image, by enlarging the pixel size based on the sampled discharge electron signal 109 are provided. COPYRIGHT: (C)2006,JPO&NCIPI
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