| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for the synthesis of a fluorine-containingβ-diketone Ni complex useful as a raw material for forming a thin film by vapor-phase chemical reaction (CVD) and having excellent vaporizability and stability. SOLUTION: A fluorine-containingβ-diketone complex of Ni is synthesized by suspending anhydrous salt of Ni(C<SB>5</SB>H<SB>7</SB>O<SB>2</SB>)<SB>2</SB>in an aprotic solvent, reacting the salt with a fluorine-containingβ-diketone added to the suspension, continuing the reaction in an inert gas while refluxing at 60-120°C, distilling off the upper layer solvent from the reaction solution separated into two layers, again adding an aprotic solvent, refluxing at 60-120°C, cooling at -20°C to +15°C to deposit crystal, separating the crystal by filtration, again adding an aprotic solvent, refluxing at 60-120°C and finally cooling at -20°C to +15°C to deposit the crystal of the complex. COPYRIGHT: (C)2006,JPO&NCIPI
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