DISPOSABLE FLUID FLOW SENSOR

摘要

A disposable fluid flow sensor is disclosed herein, which generally includes a flow channel assembly comprising a flow channel tube in association with a disposable flow channel portion. A sensor die is located approximate to a thin interface or membrane formed from the disposable flow channel portion, such that the sensor die measures a flow of fluid flowing through the flow channel tube and the disposable flow channel portion of the flow channel assembly. Additionally, a substrate can be provided upon which the sensor die is formed and located. A seal can also be provided for sealing the disposable flow channel portion to the flow channel tube. Such a flow sensor can be implemented in the context of a "non-isolated" sensor die approach in which the sensor die, substrate and flow tube are assembled together into a complete disposable assembly, in which a thin interface does not cover the sensor die. The flow sensor can also be implemented in the context of an "isolated" sensor die approach in which a thin membrane material or thin interface prevents the fluid from touching the surface of the sensor die. In such an "isolated" configuration, the sensor die is not actually part of the disposable flow tube assembly. The only disposable portion in this approach is the flow tube itself.