METHOD FOR FORMING THIN FILM, DEPOSITION SOURCE SUBSTRATE AND METHOD FOR PRODUCING THE SAME

摘要

A method for forming a thin film on a substrate through a simple configuration. In the method, a thin film (12) is formed on the thin film forming surface (11) of a substrate (10) by depositing a film material (23) thereon. The film forming surface (11) of the substrate (10) is arranged in proximity and oppositely to the material supply surface (21) of a supply substrate (20) carrying the film material (23). A recess (22) is formed on the material supply surface (21) in mirror pattern of a desired pattern and the film material (23) is arranged in the recess (22). The recess (22) forms a substantially enclosed space with the thin film forming surface (11). When the film material (23) in the recess (22) is evaporated, evaporated matters of the film material (23) are transported to each opposing region on the opposing thin film forming surface (11). Consequently, a thin film (12) is deposited on the thin film forming surface (11).