| 摘要 |
<p>A CONTROL SECTION CONTROLS AN OPERATION OF A VERTICAL DRIVE SECTION FOR VERTICALLY MOVING A CUTTER UNIT, AND THEREBY, A BLADE EDGE POSITION (HEIGHT) OF THE CUTTER UNIT CAN BE SET AND CHANGED WITH MICRO INTERVALS. NAMELY, WHEN CUTTING A PROTECTIVE TAPE APPLIED ONTO A SURFACE OF WAFER, A CONTACT PORTION OF THE PROTECTIVE TAPE AND THE BLADE EDGE IS PROPERLY CHANGED, AND THEREBY, THE PROTECTIVETAPE CAN BE ALWAYS CUT BY A SHARP BLADE EDGE ALONG AN OUTLINE OF THE WAFER.</p> |
