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发明名称
Supporting means
摘要
申请公布号
EP1215716(B1)
申请公布日期
2006.05.31
申请号
EP20010128538
申请日期
2001.11.29
申请人
INFINEON TECHNOLOGIES AG
发明人
AIGNER, KURT;BINDER, ALFRED;KROUPA, GERHARD;MATSCHITSCH, MARTIN;PUCHER, GERHARD;SCHERF, WERNER;UNTERWEGER, JOSEF;ZERLAUTH, STEFAN
分类号
H01L21/68;H01L21/00;H01L21/683
主分类号
H01L21/68
代理机构
代理人
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