METHOD OF FORMING MULTILAYER REFLECTIVE EXTREME ULTRAVIOLET LITHOGRAPHY MASK BLANKS,申请号EP20040778644-传众专利搜索

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发明名称	METHOD OF FORMING MULTILAYER REFLECTIVE EXTREME ULTRAVIOLET LITHOGRAPHY MASK BLANKS
摘要
申请公布号	EP1660941(A2)	申请公布日期	2006.05.31
申请号	EP20040778644	申请日期	2004.07.16
申请人	INTEL CORPORATION	发明人	YAN, PEI-YANG
分类号	G03F1/14;(IPC1-7):G03F7/16	主分类号	G03F1/14
代理机构		代理人
主权项
地址

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