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发明名称
METHOD FOR FABRICATING MgO POLYCRYSTALLINE THIN FILM
摘要
申请公布号
EP1184484(A4)
申请公布日期
2006.05.31
申请号
EP20010904365
申请日期
2001.02.09
申请人
FUJIKURA LTD.
发明人
IIJIMA, YASUHIRO,;KIMURA, MARIKO,;SAITO, TAKASHI,
分类号
C23C14/08;C23C14/46;(IPC1-7):C23C14/46
主分类号
C23C14/08
代理机构
代理人
主权项
地址
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